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Can Your Mass Flow Controller Control 30 different gases? We Can!
Apex Mass Flow Meters for vacuum and non-
vacuum applications combine flexibility with great
accuracy. Flexibility to choose from a list of 30 on-
board gases, to choose your input and output
voltage and the ability to use RS232
communications. The ability to control up to 26
Apex devices through one RS232 port, provides
your set-up the ultimate in flexibility.
Advantages
- Control many MFM's with one Computer
- Flow Range from 0.5 sccm to 1500 slm full-scale
- Ultra-Fast Response Time
- Extreme Accuracy
- Low Cost but far from low tech
Apex Mass Flow Meters-Standard Models
0.5 sccm 1 sccm 2 sccm 5 sccm 10 sccm 20 sccm
50 sccm 100 sccm 200 sccm 500 sccm 1 slpm
2 slpm 5 slpm 10 slpm 20 slpm 50 slpm 100 slpm
250 slpm 500 slpm 1000 slpm 1500 slpm 2000 slpm
0.5 sccm 1 sccm 2 sccm 5 sccm 10 sccm 20 sccm
50 sccm 100 sccm 200 sccm 500 sccm 1 slpm
2 slpm 5 slpm 10 slpm 20 slpm 50 slpm 100 slpm
250 slpm 500 slpm 1000 slpm 1500 slpm 2000 slpm
Other Information:
Options for Mass Flow Controllers
Power Cables- Communication Cables
Control Software- LabView Drivers
Application Example using Multiple Apex Devices
Apex Mass Flow Meters- Product Literature
Apex Mass Flow Meter Basic Specifications
Apex Mass Flow Meter Manual
Frequently Asked Questions
Options for Mass Flow Controllers
Power Cables- Communication Cables
Control Software- LabView Drivers
Application Example using Multiple Apex Devices
Apex Mass Flow Meters- Product Literature
Apex Mass Flow Meter Basic Specifications
Apex Mass Flow Meter Manual
Frequently Asked Questions
Apex Mass Flow Controllers and Mass Flow Meters are in
use all over the world in both Research and Industrial
Applications. Both OEM equipment builders and some of the
worlds finest researchers can take advantage of the Apex
Vacuum Mass Flow Controllers benefits and low price.
Applications Include:
Vacuum evaporative coating
Vacuum Sputtering
Ion-Beam Deposition
Other thin film vacuum coatings
High Temperature Furnaces- Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
use all over the world in both Research and Industrial
Applications. Both OEM equipment builders and some of the
worlds finest researchers can take advantage of the Apex
Vacuum Mass Flow Controllers benefits and low price.
Applications Include:
Vacuum evaporative coating
Vacuum Sputtering
Ion-Beam Deposition
Other thin film vacuum coatings
High Temperature Furnaces- Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
