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The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD
Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs
allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings
Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.
Try Apex Vacuum today in vacuum coating applications.
Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs
allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings
Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.
Try Apex Vacuum today in vacuum coating applications.