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Portable Mass Flow Meter Battery Powered
Field engineers now have an easy way to measure and verify flow
of installed instruments.
Companies spend time and money to
verify that installed equipment in the field
is working properly. In most cases, the
equipment has to be removed from service
and sent to a metrology lab or an in house
testing center for verification. Removal of
installed equipment takes time and in
some cases requires that the process be
shut down for removal and in some cases
stay down until the device under test is
returned from testing.

The Apex Battery Powered Mass Flow
Meter can be powered off standard 9V DC
batteries. Battery life is approximately 6-8
hours
Apex Mass Flow Meters-Standard Models
0.5 sccm       1 sccm      2 sccm     5 sccm   10 sccm     20 sccm
50 sccm       100 sccm      200 sccm     500 sccm     1 slpm
2 slpm       5 slpm     10 slpm     20 slpm    50 slpm    100 slpm
250 slpm    500 slpm   1000 slpm    1500 slpm     2000 slpm
Other Information:

Options for Mass Flow Controllers
Power Cables- Communication Cables
Control Software- LabView Drivers
Application Example using Multiple Apex Devices

Apex Mass Flow Meters- Product Literature

Apex Mass Flow Meter Basic Specifications

Apex Mass Flow Meter Manual

Frequently Asked Questions
Apex Mass Flow Controllers and Mass Flow Meters are in
use all over the world in both Research and Industrial
Applications. Both OEM equipment builders and some of the
worlds finest researchers can take advantage of the Apex
Vacuum Mass Flow Controllers benefits and low price.

Applications Include:
Vacuum evaporative coating
Vacuum Sputtering
Ion-Beam Deposition
Other thin film vacuum coatings
High Temperature Furnaces- Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD
Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs
allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.

Try Apex Vacuum today in vacuum coating applications.

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