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- Reduced inventory costs. One Apex MFC
can be used for 30 different gases.
- Fast response(10 milliseconds response,
100 milliseconds for control)
- Capable of ultra low flow (as low as
0.5SCCM full scale).
- Wide variety of flow ranges. Offered in
any range from 0.5SCCM through 1500SLPM full scale.
- Low power consumption
- Internal compensation
- Large operational flow range via 100:1
turndown ratio
- No warm up time. Apex units are fully
functional the moment they are activated.
- Measurement of multiple parameters:
Mass flow, volumetric flow, temperature and pressure. All
parameters displayed from a single device for easy
monitoring of process gasses or liquids.
- All Apex mass flow controllers can be
changed to pressure controllers or volumetric controllers
via digital interface or via the display. The user can
monitor mass flow while controlling pressure or vice
versa.
- Inherent linearity of Apex mass flow
and volumetric flow instruments result in a more accurate
and more predicable device due to the device's tendency to
naturally follow the pre-defined calibration curve.
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Standard
Features of Apex Mass Flow Meters and Mass Flow
Controllers
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•Gas Select |
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Apex mass flow controllers,
volumetric flow controllers, and pressure products allow
the user to choose any of 30 different gas calibrations
(Air, Argon, Methane, Carbon Monoxide, Carbon Dioxide,
Ethane, Hydrogen, Helium, Nitrogen, Nitrous Oxide, Neon,
Oxygen, Propane, Butane) from the gas select menu on the
display or via RS-232 communication. This means that a
single Apex device can take the place of almost
any unit in the field. Inventory costs are greatly
reduced as it is no longer necessary to purchase
different mass flow meters for each gas. |
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| •Speed
of response & control |
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Apex mass flow and pressure
controllers read in 10 milliseconds and control in 100ms |
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| •Dynamic
digital display w/ Push Button Interface |
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Apex mass flow, volumetric flow and
pressure control instruments come standard with a
graphics display that gives the operator a multitude of
information and precise field control over the device
via a simple push-button interface. |
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•Programmable Geometric Running Average |
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Apex mass flow meters have special
built in software to allow the user to slow down an
inherently fast response time. This allows the user to
read mass flow rates that might be rapidly fluctuating
by taking more samples and averaging them before
updating the display and analog output. |
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•Field Adjustable PID Loop Tuning |
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All Apex mass flow, volumteric flow
and pressure controllers have a field adjustable PID
loop which can be field tuned via the push button
interface on the display, or via RS-232 communication.
The generic tune applied at the factory will run
properly in most systems, but the ability to tweak the
tuning to match a given system can make the difference
in whether the system simply runs, or whether it runs
well. |
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| •16 Bit
Analog to digital converter w/ 8 bit micro controller |
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Along with enhanced resolution, this
processor has enabled our mass flow meters and mass flow
controllers to grow in capability, response and
stability. |
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| •Local
or remote control function for controllers |
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The push button interface allows the
user to select whether the mass flow controller will
recognize either a local set point entered via the push
button interface, an analog set point provided to the
mini-DIN connector, or a serial set point provided via
RS-232 communication. |
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•Multiple analog outputs |
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All Apex mass flow meters and mass
flow controllers have an analog output and RS-232 I/O,
however a second analog output can also be ordered. The
second analog output can be either a second output for
the mass flow rate or the second output might also be
the volumetric flow rate, the absolute pressure or the
temperature. In addition, the analog outputs can be
ordered independently as 0- 5 Vdc, 0-10 Vdc, 1-5 Vdc, or
4-20 mA signals. |
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| •Tare
Function: Automatic, Push Button or Remote |
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All Apex mass flow meters, mass flow
controllers and pressure controllers with display
include a push button tare the operator can use to zero
the meter when no flow is present. With Apex mass flow,
volumetric and pressure controllers, the tare is
automatic when the set point is at zero for longer than
2 seconds. A remote tare (ground to tare) is also
included for mass flow meters in integrated
applications. |
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| •Mass
flow controllers may be used to control absolute
pressure or volume flow |
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Field selectable loop closure allows
a mass flow controller to control absolute pressure or
volumetric flow rate. This saves in component and design
costs, as the mass controller can be set to be a
pressure controller that also provides information on
the actual mass flow and volumetric flow rates. (Note:
Retuning loop parameters P & D may be necessary). |
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•Customization Abilities |
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Apex mass flow products provide
alternative units of measure, gas mixes, totalization,
alternate STPs and more at low cost. |
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| •Digital
and Analog Communication |
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Apex flow instrumentation comes
standard with both digital and analog communication. |
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vacuum coating, vacuum
metalizing, sputtering, e-beam evaporation, controlling gas flow
in vacuum, vacuum pressure control, physical vapor deposition,
PVD, CVD, plasma, vacuum coater, MKS 1179A, Unit Mass Flow
Controller, brooks instruments, Kurt Lesker, Lesker, celerity,
sierra, hastings mass flow controller, sierra mass flow
controller, MKS Instruments mass flow controller, omega, cole
palmer, metalization vacuum |
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Updated 9/22/06 |
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